PVR/PVH Series Oil Free Scroll Vacuum Pump Unit Equal Diameter Variable Pitch Dry Vacuum Pump

Basic Properties
Place of Origin: China
Brand Name: AIRIPA
Certification: CE/CSA/CCC/ISO 9001
Model Number: PVR/PVH782 PVR/PVH1382 PVR/PVH1682 PVR/PVH2202 PVR/PVH4202 PVR/PVH4952 PVR/PVH6002/PVR/PVH6302 PVR/PVH7252
Trading Properties
Minimum Order Quantity: 1-99
Price: Bargaining
Payment Terms: L/C,D/A,D/P,T/T,Western Union
Supply Ability: 500-1000pcs/day
Specifications
Pump Type: Oil-Free Dry Screw Vacuum Pump Unit Screw Design: Equal-Diameter Variable-Pitch
Ultimate Pressure: ≤0.1 Pa / ≤1×10⁻³ Mbar / ≤7.5×10⁻⁴ Torr Pumping Speed: 2100 – 7200 M³/h (Depends On Model)
Motor Power: 4.5+2 – 22+15 KW (Depends On Model) Inlet/Outlet: ISO160–ISO250 / NW40–ISO63 (Depends On Model)
Cooling Method: Water-Cooled, 2–4 Bar, 18–30°C Service: OEM / ODM / Customization Available
High Light:

Oil Free Scroll Vacuum Pump Unit

,

Equal Diameter Vacuum Pump Unit

,

Variable Pitch Dry Vacuum Pump

Product Description

PVR/PVH Series Oil-Free Dry Equal-Diameter Variable-Pitch Screw Vacuum Pump Unit

 

1. Product Overview

The PVR/PVH Series Oil-free Dry Equal-diameter Variable-pitch Screw Vacuum Pump Unit is a flagship product developed by AIRIPA, engineered to meet the stringent requirements of high-end industrial scenarios. Combining innovative design with advanced technology, this pump unit delivers ultra-high vacuum levels, stable performance, and exceptional energy efficiency, making it the ideal choice for industries demanding high cleanliness, large pumping speed, and reliable operation.

2. Key Features

  • Two-stage Optimized Configuration for Stable Large Pumping Speed By optimizing the configuration of the two-stage pump system, the PVR/PVH series achieves an extensive pumping speed range with smooth and controllable flow changes. It perfectly adapts to high-flow and high-load process requirements, ensuring more stable vacuum output.
  • Variable-frequency Linkage Control for Adaptive Working Conditions Equipped with independently developed two-stage variable-frequency linkage system and working condition adaptive program, this pump unit can intelligently match pumping speed requirements for different working conditions. It operates with higher efficiency and lower energy consumption, reducing operational costs while maximizing performance.
  • Integrated Compact Structure with Strong Installation Adaptability Adopting an integrated design, the entire unit features a compact structure, offering excellent compatibility with installation spaces. It can be easily embedded into large production lines and clean rooms, saving valuable floor space and simplifying installation processes.
  • Ultra-high Ultimate Vacuum for Top-tier Performance The PVR/PVH series can reach an ultimate vacuum level of ≤0.1 Pa with an extremely low leakage rate of ≤1×10⁻⁶ Pa·m³/s. It provides an ultra-clean and stable ultra-high vacuum environment, meeting the strict process requirements of high-end manufacturing.
  • Perfect Nitrogen Protection for Durability Standard-equipped with nitrogen purge and sealing system, the pump unit effectively prevents contamination and corrosion from process media. It is well-suited for complex medium working conditions, ensuring long-term reliable operation of the equipment.

3. Technical Specifications

Category Parameter Item Unit PVR/PVH782 PVR/PVH1382 PVR/PVH1682 PVR/PVH2202 PVR/PVH4202 PVR/PVH4952 PVR/PVH6002 PVR/PVH6302 PVR/PVH7252
Basic Performance Pumping Speed m³/h 600 1200 1500 2100 4200 4500 5400 6300 7200
  Ultimate Pressure Torr ≤7.5×10⁻⁴ ≤7.5×10⁻⁴ ≤7.5×10⁻⁴ ≤7.5×10⁻⁴ ≤7.5×10⁻⁴ ≤7.5×10⁻⁴ ≤7.5×10⁻⁴ ≤7.5×10⁻⁴ ≤7.5×10⁻⁴
  Ultimate Pressure mbar ≤1×10⁻³ ≤1×10⁻³ ≤1×10⁻³ ≤1×10⁻³ ≤1×10⁻³ ≤1×10⁻³ ≤1×10⁻³ ≤1×10⁻³ ≤1×10⁻³
  Ultimate Pressure Pa ≤0.1 ≤0.1 ≤0.1 ≤0.1 ≤0.1 ≤0.1 ≤0.1 ≤0.1 ≤0.1
Motor Power Frequency Hz 50 50 50 50 50 50 50 50 50
  Voltage V 220-380 220-380 220-380 220-380 220-380 220-380 220-380 220-380 220-380
  Rated Power kW 4.5+2 4.5+4.5 4.5+4.5 6+4.5 6+6 11+7.5 15+7.5 15+11 22+15
Interface Inlet / ISO160 ISO160 ISO160 ISO160 ISO200 ISO200 ISO250 ISO250 ISO250
  Outlet / NW40 NW40 NW40 NW40 ISO63 ISO63 ISO63 ISO63 ISO63
Cooling Water Flow Rate L/min 3-8 3-8 6-10 6-10 10-15 10-15 10-15 15-20 15-20
  Pressure bar 2-4 2-4 2-4 2-4 2-4 2-4 2-4 2-4 2-4
  Temperature °C 18-30 18-30 18-30 18-30 18-30 18-30 18-30 18-30 18-30
Nitrogen Pressure bar 1.5-2.0 1.5-2.0 1.5-2.0 1.5-2.0 1.5-2.0 1.5-2.0 1.5-2.0 1.5-2.0 1.5-2.0
  Air Lock Flow Rate L/min 0-60 0-60 0-60 0-60 0-60 0-60 0-60 0-60 0-60
  Sealing Flow Rate L/min 0-20 0-20 0-20 0-20 0-20 0-20 0-20 0-20 0-20
  Connector / Swagelok 1/4" Swagelok 1/4" Swagelok 1/4" Swagelok 1/4" Swagelok 1/4" Swagelok 1/4" Swagelok 1/4" Swagelok 1/4" Swagelok 1/4"
Reliability Leakage Rate Pa·m³/s 1×10⁻⁶ 1×10⁻⁶ 1×10⁻⁶ 1×10⁻⁶ 1×10⁻⁶ 1×10⁻⁶ 1×10⁻⁶ 1×10⁻⁶ 1×10⁻⁶
Operating Environment Ambient Temperature Range °C 5-40 5-40 5-40 5-40 5-40 5-40 5-40 5-40 5-40

4. Core Application Fields

The PVR/PVH Series Oil-free Dry Equal-diameter Variable-pitch Screw Vacuum Pump Unit is specially designed for ultra-clean, large pumping speed, and high-stability high-end industrial scenarios, and is widely used in:

  • Semiconductor Manufacturing: High-cleanliness processes such as wafer processing, ion implantation, and vacuum coating.
  • Photovoltaic New Energy: Key links including crystal silicon production, thin-film battery manufacturing, vacuum coating, and wafer processing.
  • Lithium Battery New Energy: Processes like electrolyte degassing, pole piece drying, and liquid injection vacuuming.
  • Other High-end Industries: High-load scenarios such as large-scale vacuum heat treatment, fine chemical engineering, and large negative pressure systems.