PVR PVH Dry Screw Vacuum Pump Water Cooling With Adjustable Variable Frequency Control
| Product Type: | Oil Free Dry Screw Vacuum Pump | Model Series: | PVR / PVH Series |
| Pumping Speed: | 600–7200 M³/h (Depending On Model) | Motor Power: | 4.5+2 To 22+15 KW (Depending On Model) |
| Drive Type: | Variable Frequency Drive | Cooling Method: | Water Cooled |
| Nitrogen Purge: | Available | Other service: | OEM, ODM & Customization Available |
| Ultimate Pressure: | ≤0.1 Pa | ||
| High Light: | PVH Dry Screw Vacuum Pump,PVR Vacuum Pump Dry Screw,Dry Screw Vacuum Pump Water Cooling |
||
PVR PVH Dry Screw Vacuum Pump With Adjustable Variable-Frequency Control Water Cooling
1. Product Overview
The AIRIPA PVR PVH Series Oil Free Dry Screw Vacuum Pump is a high-capacity industrial vacuum pumping unit featuring equal-diameter, variable-pitch screw technology and an optimized two-stage pumping configuration. Designed for clean, high-vacuum applications, it combines an oil-free pumping chamber with controlled gas compression and efficient vacuum generation.
The series includes nine listed model configurations, offering nominal pumping speeds from 600 to 7,200 m³/h and a specified ultimate pressure of ≤0.1 Pa.
With variable-frequency control, water cooling, nitrogen purge protection and an integrated enclosure, the PVR/PVH Series is suitable for demanding semiconductor, photovoltaic, lithium battery and industrial vacuum processing applications.

2. Key Features & Benefits
Optimized Two-Stage Pumping Design
A two-stage configuration provides a wider pumping range and supports stable vacuum performance under varying gas loads.
Equal-Diameter Variable-Pitch Rotors
Variable-pitch screw geometry provides progressive gas compression to support pumping efficiency and energy management.
Oil-Free Pumping Chamber
Dry screw technology eliminates oil injection into the pumping chamber, helping reduce process contamination risks.
High Pumping Capacity
Nominal pumping speeds from 600 to 7,200 m³/h accommodate large industrial vacuum systems and high gas-throughput requirements.
High Vacuum Performance
A specified ultimate pressure of ≤0.1 Pa supports processes requiring low operating pressures and clean vacuum conditions.
Variable-Frequency Control
Adjustable motor operation helps match pumping performance to changing process requirements.
Water Cooling and Nitrogen Protection
Water cooling supports temperature management, while nitrogen purge and sealing provisions help protect the pumping system.
Integrated Industrial Construction
The enclosed unit design supports equipment integration, installation and maintenance access.
3. Working Principle
The PVR/PVH Series uses synchronized, non-contacting screw rotors to transport gas through the pumping chambers. Its equal-diameter, variable-pitch geometry progressively compresses gas as it moves from the inlet toward the exhaust.
The optimized two-stage configuration combines pumping sections to increase overall gas-handling capacity and achieve lower pressures. Variable-frequency control adjusts operating speed, while water cooling and nitrogen purge systems support stable operation under suitable industrial process conditions.
4. Technical Specifications
Table 1. Pumping Performance, Motor and Connections
| Model | Pumping Speed (m³/h) | Ultimate Pressure (Pa) | Rated Motor Power (kW) | Frequency (Hz) | Voltage (V) | Inlet | Exhaust |
|---|---|---|---|---|---|---|---|
| PVR/PVH782 | 600 | ≤0.1 | 4.5+2 | 50 | 220–380 | ISO160 | NW40 |
| PVR/PVH1382 | 1,200 | ≤0.1 | 4.5+4.5 | 50 | 220–380 | ISO160 | NW40 |
| PVR/PVH1682 | 1,500 | ≤0.1 | 4.5+4.5 | 50 | 220–380 | ISO160 | NW40 |
| PVR/PVH2202 | 2,100 | ≤0.1 | 6+4.5 | 50 | 220–380 | ISO160 | NW40 |
| PVR/PVH4202 | 4,200 | ≤0.1 | 6+6 | 50 | 220–380 | ISO200 | ISO63 |
| PVR/PVH4952 | 4,500 | ≤0.1 | 11+7.5 | 50 | 220–380 | ISO200 | ISO63 |
| PVR/PVH6002 | 5,400 | ≤0.1 | 15+7.5 | 50 | 220–380 | ISO250 | ISO63 |
| PVR/PVH6302 | 6,300 | ≤0.1 | 15+11 | 50 | 220–380 | ISO250 | ISO63 |
| PVR/PVH7252 | 7,200 | ≤0.1 | 22+15 | 50 | 220–380 | ISO250 | ISO63 |
Additional Ultimate Pressure Specifications:
-
Ultimate Pressure (Torr): ≤7.5 × 10⁻⁴
-
Ultimate Pressure (mbar): ≤1 × 10⁻³
Table 2. Cooling Water, Nitrogen Purge and Operating Conditions
| Model | Cooling Water Flow (L/min) | Cooling Water Pressure (bar) | Cooling Water Temp. (°C) | Nitrogen Pressure (bar) | Nitrogen Flow (L/min) | Seal Gas Flow (L/min) |
|---|---|---|---|---|---|---|
| PVR/PVH782 | 3–8 | 2–4 | 18–30 | 1.5–2.0 | 0–60 | 0–20 |
| PVR/PVH1382 | 3–8 | 2–4 | 18–30 | 1.5–2.0 | 0–60 | 0–20 |
| PVR/PVH1682 | 6–10 | 2–4 | 18–30 | 1.5–2.0 | 0–60 | 0–20 |
| PVR/PVH2202 | 6–10 | 2–4 | 18–30 | 1.5–2.0 | 0–60 | 0–20 |
| PVR/PVH4202 | 10–15 | 2–4 | 18–30 | 1.5–2.0 | 0–60 | 0–20 |
| PVR/PVH4952 | 10–15 | 2–4 | 18–30 | 1.5–2.0 | 0–60 | 0–20 |
| PVR/PVH6002 | 10–15 | 2–4 | 18–30 | 1.5–2.0 | 0–60 | 0–20 |
| PVR/PVH6302 | 15–20 | 2–4 | 18–30 | 1.5–2.0 | 0–60 | 0–20 |
| PVR/PVH7252 | 15–20 | 2–4 | 18–30 | 1.5–2.0 | 0–60 | 0–20 |
Common Technical Specifications:
-
Nitrogen Connection: Swagelok 1/4"
-
Specified Leakage Rate: 1 × 10⁻⁶ Pa·m³/s
-
Operating Ambient Temperature: 5–40°C
-
Pumping Technology: Oil-Free Dry Screw
-
Rotor Design: Equal Diameter, Variable Pitch
-
Pumping Configuration: Optimized Two-Stage Design
Note: Product models, technical specifications, and configurations are subject to ongoing updates and improvements. For the latest product information, detailed specifications, and model availability, please contact AIRIPA's professional customer service team for confirmation.
5. Industrial Applications
Semiconductor Manufacturing
Supports compatible crystal growth, ion implantation, vacuum coating and other semiconductor-related processes requiring clean vacuum conditions.
Photovoltaic Manufacturing
Suitable for selected silicon wafer, thin-film solar cell and vacuum coating production equipment.
Lithium Battery Production
Can be integrated into compatible battery drying, electrolyte handling and vacuum-assisted manufacturing processes.
Advanced Industrial Processing
Supports large vacuum heat-treatment systems, precision chemical processing and other high gas-load vacuum applications.
Application suitability depends on process gas composition, condensable vapors, particulates, operating temperature and the selected purge configuration.
Why Choose AIRIPA as Your Vacuum Pump Manufacturer?

Direct Factory Manufacturing
AIRIPA operates its own manufacturing workshops and assembly facilities, supporting factory-direct supply and efficient project communication.
Engineering Support
Our technical team assists with pump selection, process requirements and vacuum system integration.
Assembly and Quality Testing
In-house assembly and factory testing processes support equipment verification and manufacturing quality control.
OEM and ODM Services
AIRIPA supports OEM, ODM and private labeling requirements for industrial equipment manufacturers, distributors and system integrators.
6. Frequently Asked Questions
Q1. What is the difference between the PVR/PVH Series and a standard dry screw vacuum pump?
The PVR/PVH Series features an optimized two-stage pumping configuration designed for higher pumping capacity and lower ultimate pressure than the specifications listed for AIRIPA's PV Series.
Q2. Is the PVR/PVH Series completely oil-free?
The gas pumping chamber operates without oil injection. Other mechanical components may require lubrication, depending on the equipment design.
Q3. What pumping speed range does the PVR/PVH Series offer?
The nine listed configurations provide nominal pumping speeds from 600 to 7,200 m³/h.
Q4. Does the PVR/PVH Series require cooling water and nitrogen?
The supplied specifications include water-cooling requirements and nitrogen purge provisions. Actual nitrogen use depends on the selected process and operating configuration.
Q5. Is the PVR/PVH Series suitable for semiconductor and lithium battery production?
It can support compatible semiconductor, photovoltaic and lithium battery manufacturing processes. Gas compatibility and operating requirements should be reviewed before selection.
Q6. Can AIRIPA provide customized vacuum pump solutions?
Yes. AIRIPA supports OEM, ODM, private labeling and technical consultation for industrial vacuum equipment projects.

7. Model Selection & Request a Quote
Find the Right PVR/PVH Vacuum Pump
AIRIPA offers nine configurations with nominal pumping speeds from 600 to 7,200 m³/h for different industrial vacuum requirements.
Get a Factory-Direct Quote
Looking for a reliable dry screw vacuum pump manufacturer?
AIRIPA provides factory-direct supply, technical support and OEM/ODM services. Share your required pumping speed, operating pressure and application details for a suitable model recommendation and quotation.
Contact AIRIPA Today for Technical Support & a Customized Quote.