AIRIPA Oil Free High Vacuum Piston Pump For Clean Room / Automation Line
| Product name: | Oil Free High Vacuum Piston Pump | Lubrication: | Oil Free Dry Operation |
| Ultimate Vacuum: | 3.7Pa | Rated Pumping Speed: | 15m³/h |
| Rated Power: | 750W | Connection Port: | KF25 |
| Other service: | OEM, ODM & Customization Available | Warranty period: | 2 Years |
| Operating Temp: | 0℃-50℃ | Application: | Semiconductor Medical Lab Automation |
| High Light: | Oil Free Vacuum Piston Pump,High Vacuum Piston Pump,Clean Room Vacuum Piston Pump |
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AIRIPA Oil Free High Vacuum Piston Pump Stable Performance For Clean Room And Automation Line
Product Overview
This oil-free high vacuum piston pump is a dry-type vacuum solution designed for high-purity vacuum scenarios. It adopts self-lubricating piston structure to deliver completely oil-free clean vacuum, avoiding secondary contamination to workpieces and chambers. With 3.7Pa ultimate vacuum and 15m³/h rated pumping speed, it matches strict requirements of precision industries. It is equipped with 100% pure copper motor with Class B insulation, ensuring stable continuous operation under 0℃-50℃ ambient temperature.

Key Features and Benefits
Oil-Free Clean Vacuum Output
Fully dry piston structure with self-lubricating materials, no lubricating oil required during operation. It outputs 100% oil-free clean vacuum, perfectly suitable for contamination-sensitive industries.
High Vacuum Performance
Ultimate vacuum reaches 3.7Pa, providing stable high vacuum environment to meet precision processing demands of semiconductor and medical procedures.
Reliable Pure Copper Motor
Built with 100% pure copper winding and Class B insulation, the motor features excellent heat resistance and long service life, supporting long-time continuous operation.
Wide Environmental Adaptability
Operates stably within 0℃ to 50℃ ambient temperature and 25%-85% relative humidity, adapts to various workshop and laboratory environments.
Standard KF25 Interface
Equipped with standard KF25 inlet and outlet ports, compatible with most vacuum system fittings, easy for installation and system integration.
Stable Low-Maintenance Operation
Mature piston structure with few wearing parts, reduces daily maintenance work and lowers long-term operation costs for industrial users.
Working Principle
This oil-free piston vacuum pump adopts reciprocating piston structure. Driven by the motor, the piston moves back and forth in the cylinder to change the volume of the vacuum chamber, completing air suction and compression exhaust cycles. Self-lubricating sealing materials are used inside the chamber, no lubricating oil is involved in the whole compression process, so the output vacuum is completely clean and oil-free.

Technical Specifications
| Item | Parameter |
|---|---|
| Rated Pumping Speed (50Hz) | 15 m³/h |
| Maximum Pumping Speed (50Hz) | 20 m³/h |
| Ultimate Vacuum | 3.7 Pa |
| Rated Power | 750W ±5% |
| Rated Voltage | 220V / 380V AC |
| Rated Current | 2A ±5% |
| Rated Motor Speed | 1440 r/min |
| Inlet & Outlet Port | KF25 |
| Motor Feature | 100% Pure Copper Winding, Class B Insulation |
| Operating Ambient Temperature | 0℃ - 50℃ |
| Operating Relative Humidity | 25% - 85% |
| Dimension L×W×H | 571×225×365 mm |
Note: Product images are for reference only. The final delivered product shall be subject to the actual goods. For detailed parameters and customization, please consult our professional customer service team.

Industrial Applications
Widely used in semiconductor manufacturing, medical equipment, laboratory research, industrial automation, clean room processes and other scenarios with high requirements for vacuum cleanliness and stability.
Why Choose AIRIPA?
AIRIPA is a professional manufacturer specializing in R&D and production of oil-free vacuum pumps and compressed air equipment, focusing on delivering clean and reliable fluid power solutions for global high-end industrial customers.

Strict Quality Control
Each pump undergoes full performance testing and appearance inspection before delivery to ensure consistent parameters and reliable quality.
Premium Core Components
We adopt high-grade self-lubricating materials and pure copper motors to guarantee stable performance and long service life.
Professional Technical Support
Our engineering team provides professional model selection guidance and after-sales technical support for vacuum system integration.
Factory Direct Supply
As the original manufacturer, we offer competitive factory-direct prices and support customized configurations for bulk orders.
Frequently Asked Questions
- Is this piston vacuum pump completely oil-free? Yes. It adopts dry piston structure with self-lubricating seals. No lubricating oil is used in the vacuum chamber, and the output vacuum is completely oil-free.
- What is the ultimate vacuum of this pump? The ultimate vacuum of this pump can reach 3.7Pa, which meets the high vacuum requirements of most precision industrial processes.
- What connection interface does this pump use? Both inlet and outlet adopt standard KF25 interface, which is compatible with most vacuum pipeline fittings.
- What is the applicable ambient temperature range? It can work stably in the environment of 0℃ to 50℃, adapting to most indoor industrial and laboratory scenarios.
- Is this pump suitable for semiconductor and medical applications? Yes. Its oil-free clean vacuum output is specially designed for contamination-sensitive scenarios such as semiconductor processing, medical equipment and laboratories.
Request a Quote
This oil-free high vacuum piston pump series provides multiple models with different pumping speeds and configurations to match various vacuum process requirements. If you need detailed technical datasheets, bulk quotation, customized solutions or further product information, please feel free to send your inquiry to mailto:evelyn@airipa.com. Our professional team will get back to you promptly with detailed solutions.